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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 151번부터 160번까지의 결과를 표시합니다.
2024
Conference
Experimental Investigation of the Mask Diffraction Obstructed by the Critical-sized Sn Particles on EUV Pellicle
- 2024-06-05
Conference
Study of Enhancing Etching Performance of Pt-based Absorber Material for EUV Mask
- 2024-06-05
Conference
Dry Development Process for Vertically Tailored Hybrid Multilayer EUV Photoresist
- 2024-06-05
Article
In-depth Analysis of the Hafnia Ferroelectrics as a Key Enabler for Low Voltage & QLC 3D VNAND beyond 1K Layers: Experimental Demonstration and Modeling
- Kim, Giuk ;
- Choi, Hyojun ;
- Shin, Hunbeom ;
- Lee, Sangho ;
- Lee, Sangmok ;
- ... Ahn, Jinho ;
- 외 10명
- 2024-06
- Digest of Technical Papers - Symposium on VLSI Technology
Article
Low-Damage Processed and High-Pressure Annealed High-k Hafnium Zirconium Oxide Capacitors near Morphotropic Phase Boundary with Record-Low EOT of 2.4Å & high-k of 70 for DRAM Technology
- Gaddam, Venkateswarlu ;
- Hwang, Junghyeon ;
- Shin, Hunbeom ;
- Kim, Chaeheon ;
- Kim, Giuk ;
- ... Ahn, Jinho ;
- 외 10명
- 2024-06
- Digest of Technical Papers - Symposium on VLSI Technology
Article
Novel strategies for low-voltage NAND flash memory with negative capacitance effect
- Kim, Giuk ;
- Kim, Taeho ;
- Lee, Sangho ;
- Hwang, Junghyeon ;
- Jung, Minhyun ;
- ... Ahn, Jinho ;
- 외 1명
- 2024-05
- Japanese Journal of Applied Physics
- IOP Publishing Ltd
Article
EUV reflectometry and scatterometry for thin layer and periodic structure characterization
- Shen, Tao ;
- Mochi, Iacopo ;
- Ansuinelli, Paolo ;
- Jeong, Dongmin ;
- Ahn, Jinho ;
- 외 1명
- 2024-04
- METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII
- SPIE-INT SOC OPTICAL ENGINEERING
Article
A novel solution for next-generation EUV pellicle: Breathable membrane with increased transmittance
- Kim, Haneul ;
- Kim, Jungyeon ;
- Kang, Young-Woo ;
- Kim, Min-Woo ;
- Ha, Tae Joong ;
- ... Ahn, Jinho ;
- 외 2명
- 2024-04
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE