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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 181번부터 190번까지의 결과를 표시합니다.
2023
Conference
Gas type optimization for dry development of CF4-based plasma on organic-inorganic hybrid EUV photoresist
- 2023-11-17
Conference
The hole-patterned pellicle with a diameter of sub-220 nm as a solution to increase EUV transmittance
- 2023-11-17
Article
Molybdenum carbide pellicle for high-power EUV lithography
- Kim, Yongkyung ;
- Seong, Kihun ;
- Yoon, Jonghyuk ;
- Lee, Donggi ;
- Moon, Seungchan ;
- ... Ahn, Jinho ;
- 외 4명
- 2023-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2023
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Platinum-based alloy absorber with improved etching properties for next-generation EUV mask
- Kim, Yunsoo ;
- Jeong, Dongmin ;
- Lee, Seungho ;
- Ahn, Jinho
- 2023-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2023
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Experimental investigation of the mask diffraction light blocking with critical-sized Sn particles on the EUV pellicle
- Moon, Seungchan ;
- Lee, Dong Gi ;
- Choi, Jinhyuk ;
- Hong, Junho ;
- Ahn, Jinho
- 2023-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2023
- SPIE-INT SOC OPTICAL ENGINEERING
Conference
Evaluation method for phase shift of EUV light and refractive index using optical flat interferometer
- 2023-10-02
Conference
Experimental investigation of the mask diffraction light blocking with critical-sized Sn particles on EUV pellicle
- 2023-10-02