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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Capacitance enhancement of Ru/ZrO2/Ru metal–insulator–metal capacitors via the annealing-induced densification of the top Ru electrode
- Park, Jun Hyeong ;
- Kim, Sung Jun ;
- Jung, Hoi Yoon ;
- Shin, Wangchul ;
- Lee, Taeho ;
- ... Ahn, Jinho ;
- 외 2명
- 2026-11
- Applied Surface Science
- Elsevier BV
Article
Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturing
- Yang, Hae Lin ;
- Kim, Min Chan ;
- Park, Gi-Beom ;
- Park, Ji-Yeon ;
- Park, Hyein ;
- ... Ahn, Jinho ;
- ... Park, Jin-Seong ;
- 외 1명
- 2026-08
- International Journal of Extreme Manufacturing
- IOP Publishing
Article
Thermal atomic layer deposition of SiNx protective coatings for hydrogen plasma-resistant carbon nanotube pellicles
- Kang, Young Woo ;
- Kim, Haneul ;
- Lee, Inseo ;
- Lee, Taeho ;
- Park, In-Sung ;
- ... Ahn, Jinho
- 2026-08
- Applied Surface Science
- Elsevier BV
Article
Effect of Deposition Method on Grain Boundary Alignment and Off-State Leakage in Polycrystalline Silicon Channel
- Kim, Sung Jun ;
- Park, Jun Hyeong ;
- Jung, Hoi Yoon ;
- Park, In-Sung ;
- Lee, Taeho ;
- ... Ahn, Jinho ;
- 외 5명
- 2026-07
- Crystals
- Multidisciplinary Digital Publishing Institute (MDPI)
Article
Development of Extreme Ultraviolet Pellicles Based on Yttrium Core with Amorphous Carbon Capping Layer
- Seong, Kihun ;
- Kim, Hye-Young ;
- Kim, Yongkyung ;
- Kim, Hyeongkeun ;
- Kim, Won Jin ;
- ... Ahn, Jinho ;
- 외 3명
- 2026-07
- Electronic Materials Letters
- KOREAN INST METALS MATERIALS
Article
Effective Dipole Strength Modulation Using Imprinted Gadolinium Dipole (IGD) Layer to Achieve Fine Vt Tunability for Low Thermal Budget CFET Devices
- Han, Sangkuk ;
- Choi, Wonjae ;
- Chung, Jaewon ;
- Jang, Haesoo ;
- Park, Kyungwook ;
- ... Ahn, Jinho ;
- ... Choi, Changhwan ;
- 외 5명
- 2026-07
- Digest of Technical Papers - Symposium on VLSI Technology
- Institute of Electrical and Electronics Engineers Inc.
Article
Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography
- Chu, Thi Thu Huong ;
- Le, Dan N. ;
- Lee, Minjong ;
- Narayan, Dushyant M. ;
- Kim, Doo San ;
- ... Ahn, Jinho ;
- ... Sung, Myung Mo ;
- 외 7명
- 2026-06
- Chemical Science
- ROYAL SOC CHEMISTRY
Article
TiO2 nanolayer-assisted top-interface engineering for disturbance-free FeFETs: a blueprint for future van der Waals memory
- Kang, Hyunjun ;
- Kwal, Junhyeok ;
- Kim, Giuk ;
- Lee, Sangho ;
- Kim, Yongyeon ;
- ... Ahn, Jinho ;
- 외 6명
- 2026-05
- Nano Convergence
- SPRINGER
Article
Conformal SiNx Coating on Carbon Nanotubes via Transient UV–Ozone Functionalization and Two-Step Atomic Layer Deposition
- Kang, Young Woo ;
- Kim, Haneul ;
- Lee, Inseo ;
- Kim, Yongkyung ;
- Park, In-Sung ;
- ... Ahn, Jinho
- 2026-05
- Materials
- MDPI
Article
A Novel Ferroelectric NAND Cell Structure Featuring Ultrathin IGZO Charge Trap Layer for Superior Endurance and Retention
- Kang, Hyunjun ;
- Joh, Hongrae ;
- Kwak, Junhyeok ;
- Kim, Giuk ;
- Choi, Hyojun ;
- ... Ahn, Jinho ;
- 외 7명
- 2026-05
- IEEE Transactions on Electron Devices
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC