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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 231번부터 240번까지의 결과를 표시합니다.
2022
Article
Removal Behavior of Sn and Pb Contaminants on EUV mask after EUV Exposure
- Kwon, Dong hyeon ;
- Kang, Hyun gyu ;
- Kim, Tae Gon ;
- Ahn, JIn Ho ;
- Lee, Sang Sul ;
- 외 1명
- 2022-12
- PHOTOMASK TECHNOLOGY 2022
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Near-field infrared nanoscopic study of EUV- and e-beam-exposed hydrogen silsesquioxane photoresist
- Kim, Jiho ;
- Lee, Jin-Kyun ;
- Chae, Boknam ;
- Ahn, Jinho ;
- Lee, Sangsul
- 2022-12
- NANO CONVERGENCE
- SPRINGER
Conference
Impact of Thermo-Mechanical Properties of EUV Pellicle on Critical Dimension Uniformity
- 2022-11-07