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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 241번부터 250번까지의 결과를 표시합니다.
2022
Conference
Experimental Demonstration for the Effect of EUV Pellicle Wrinkles on Mask 3D Effect and Mask Imaging Performance
- 2022-11-07
Conference
EUV Mask Performance Enhancement Through Controlling Mask Bias for C/H Patterns
- 2022-11-07
Conference
Large Scale Nanometer-thickness Molybdenum Carbide Membrane for Extreme Ultraviolet Pellicle
- 2022-11-07
Conference
Experimental demonstration for the influence of EUV pellicle wrinkles on the mask 3D effects
- 2022-09-28
Conference
Feasibility of nanometer-thickness molybdenum carbide film for extreme ultraviolet pellicle
- 2022-09-28