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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 21번부터 30번까지의 결과를 표시합니다.
2026
Conference
Resolution enhancement in EUV ptychography via optimized probe overlap ratio for diffraction diversity
- 2026-02-25
Conference
Reliable actinic mask evaluation via high-frequency signal enhancement in EUV ptychography
- 2026-02-25
Conference
Vapor-Phase Dry Development Enabling High-Resolution and Improved CDU in EUV Photoresists
- 2026-02-25
Conference
Functionalization of CNT Surface for Conformal Coating in EUV Pellicle Applications
- 2026-02-06
Conference
Resolution Enhancement in EUV Ptychography via Optimized Probe Overlap Ratio for Diffraction Diversity
- 2026-02-06
Conference
Enhancing Etching and Imaging Performance of Pt-Based EUV Mask Absorbers via Ion Implantation
- 2026-02-06
Conference
Vapor-Phase Dry Development for High-Resolution Patterning and Improved Uniformity in EUV Resists
- 2026-02-06
Article
Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet Pellicles
- Kim, Won Jin ;
- Wi, Seong Ju ;
- Moon, Seungchan ;
- Hong, Junho ;
- Lee, Taeho ;
- ... Ahn, Jinho ;
- 외 1명
- 2026-02
- Crystals
- MDPI