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자료 필터
자료유형
발행연도
2011 ~ 2027
2011 2027
키워드
언어
전체 521건 중 101번부터 110번까지의 결과를 표시합니다.
2024
Article
Compositional tailoring of indium-free GZO layers via plasma-enhanced atomic layer deposition for highly stable IGZO/GZO TFT
- Oh, Hye-Jin ;
- Kim, Yoon-Seo ;
- Jeong, Hyun-Jun ;
- Lee, Sunhee ;
- Park, Joon Seok ;
- ... Park, Jin-Seong
- 2024-07
- Journal of Information Display
- TAYLOR & FRANCIS LTD
Conference
Tailoring Growth and film properties of Plasma Enhanced ALD In2O3 Layer Using Amine and Alkyl-Based Novel Indium Precursors
- 2024-06-05
Conference
Enhanced Reliability of ALD-IGZO Transistors with Dual-Layer Gate Insulator Design
- 2024-06-05
Conference
Thermal-stable low-k SiONC thin films deposited by plasma-assisted molecular layer deposition with Tetraisocyanatesilane (TICS) and Phloroglucinol (Phl)
- 2024-06-05
Conference
Unveiling Thermally-Activated Defects for Highly Reliable ALD-IGZO FETs with High-Temperature Compatibility
- 2024-06-05
Article
Boosted growth rate using discrete reactant feeding method and novel precursor of indium oxide by atomic layer deposition
- Yang, Hae Lin ;
- Kim, Hye-Mi ;
- KAMIMURA, Sunao ;
- EIZAWA, Aya ;
- TERAMOTO, Takashi ;
- ... Park, Jin-Seong ;
- 외 2명
- 2024-05
- Applied Surface Science
- ELSEVIER
Article
Reliability Engineering of High-Mobility IGZO Transistors via Gate Insulator Heterostructures Grown by Atomic Layer Deposition
- 김윤서 ;
- Hwang, Taewon ;
- Oh, Hye-Jin ;
- Park, Joon Seok ;
- 박진성
- 2024-05
- Advanced Materials Interfaces
- WILEY
Article
Control of subthreshold swing using an in situ PEALD nano-laminated IGZO/Al2O3 multi-channel structured TFT
- 이원범 ;
- 김윤서 ;
- Park, Jin-Seong
- 2024-04
- Journal of Information Display
- TAYLOR & FRANCIS LTD
Article
Optimizing the Crystallinity of a ZrO2 Thin Film Insulator for InGaZnO-Based Metal–Insulator–Semiconductor Capacitors
- Nam, Minkyeong ;
- Lee, Seungwoo ;
- Jeong, Hanseok ;
- Yoon, Ara ;
- Park, Jin-Seong ;
- 외 1명
- 2024-04
- Advanced Materials Interfaces
- WILEY
Article
A Route to MoO2 film fabrication via atomic layer deposition using Mo(IV) precursor and oxygen reactant for DRAM applications
- Yoon, Ara ;
- Yang, Hae Lin ;
- Lee, Sanghoon ;
- Lee, Seunghwan ;
- Kim, Beomseok ;
- ... Park, Jin-Seong ;
- 외 2명
- 2024-04
- Ceramics International
- ELSEVIER SCI LTD