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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 121번부터 130번까지의 결과를 표시합니다.
2024
Article
Development of a Porous Patterned Membrane with a Large Field Size for EUV Pellicles
- Ha, Tae Joong ;
- Lee, Gi-Sung ;
- Kim, Haneul ;
- Kim, Jungyeon ;
- Ahn, Jinho
- 2024-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Multilayered EUV Pellicle: Enhanced Mechanical Strength and Thermal Stability
- Kang, Young Woo ;
- Kim, Ha Neul ;
- Lee, Taeho ;
- Park, Young Wook ;
- Ahn, Jinho
- 2024-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Article
A dry development process for vertically tailored hybrid multilayer EUV photoresist: Chemical Vapor Development (CVD)
- Seok, Ji-Hoo ;
- Kim, Jiwon ;
- Ji, Hyeonseok ;
- Lee, Jaehyuk ;
- Yoon, Kwangsub ;
- ... Sung, Myung Mo ;
- ... Ahn, Jinho
- 2024-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Article
Improving Etchability of Challenging Materials through the Ion Implantation Process
- Kim, Yunsoo ;
- Jeong, Dongmin ;
- Lee, Seungho ;
- Kim, Myung-Jin ;
- Kim, Bom-Sok ;
- ... Ahn, Jinho ;
- 외 1명
- 2024-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Conference
Improving Etchability of Challenging Materials through the Ion Implantation Process
- 2024-10-01
Article
Spectral reflectometry characterization of an extreme ultraviolet attenuated phase-shifting mask blank
- Shen, Tao ;
- Mochi, Iacopo ;
- Jeong, Dongmin ;
- Mueller, Elisabeth ;
- Ansuinelli, Paolo ;
- ... Ahn, Jinho ;
- 외 1명
- 2024-10
- Journal of Micro/ Nanolithography, MEMS, and MOEMS
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Article
A six-level ferroelectric storage cell based on a bidirectional imprint field
- Kim, Chaeheon ;
- Hwang, Junghyeon ;
- Shin, Hunbeom ;
- Ahn, Jinho ;
- Jeon, Sanghun
- 2024-10
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY
Article
The Effect of Ferroelectric/Dielectric Capacitance Ratio on Short-Term Retention Characteristics of MFMIS FeFET
- Hwang, Junghyeon ;
- Kim, Giuk ;
- Joh, Hongrae ;
- Ahn, Jinho ;
- Jeon, Sanghun
- 2024-10
- IEEE Journal of the Electron Devices Society
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Article
Spectral reflectometry characterization of an extreme ultraviolet attenuated phase-shifting mask blank (vol 23, 041402, 2024)
- Shen, Tao ;
- Mochi, Iacopo ;
- Jeong, Dongmin ;
- Mueller, Elisabeth ;
- Ansuinelli, Paolo ;
- ... Ahn, Jinho ;
- 외 1명
- 2024-10
- Journal of Micro/ Nanolithography, MEMS, and MOEMS
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS