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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 959건 중 81번부터 90번까지의 결과를 표시합니다.
2025
Conference
Investigation of high-k binary mask for high-NA EUV: mitigating focus-induced NILS and LCDU variations
- 2025-01-17
Conference
Ptychographic Imaging for High-fidelity Actinic Inspection of Mask Patterns with EUV Microscope
- 2025-01-16
Conference
Enhanced contact resistance between ALD-Ru and W by oxygen removal using forming gas annealing
- 2025-01-16
Conference
Phase delta control in EUV phase shift mask to improve NILS and mitigating stochastic effect
- 2025-01-16
Article
Advances in n-type crystalline oxide channel layers for thin-film transistors: materials, fabrication techniques, and device performance
- Kim, Gwang-Bok ;
- Choi, Cheol Hee ;
- Hur, Jae Seok ;
- Ahn, Jinho ;
- Jeong, Jae Kyeong
- 2025-01
- Journal of Physics D: Applied Physics
- IOP Publishing Ltd
Article
Enhanced resistance property between ALD-Ru and W by controlling oxygen behavior with post Ru deposition annealing
- Kim, Sung Jun ;
- Kim, Seon Yong ;
- Park, Jun Hyeong ;
- Park, In-Sung ;
- Park, Young Wook ;
- ... Ahn, Jinho
- 2025-01
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
2024
Article
Positive Interaction between Charge Trapping and Polarization Switching in Metal-Interlayer-Ferroelectric-Interlayer-Silicon (MIFIS) Ferroelectric Field-Effect Transistor
- Choi, Hyojun ;
- Kim, Giuk ;
- Lee, Sangho ;
- Shin, Hunbeom ;
- Lim, Youngjin ;
- ... Ahn, Jinho ;
- 외 5명
- 2024-12
- IEEE Electron Device Letters
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Article
Damage mitigation as a strategy to achieve high ferroelectricity and reliability in hafnia for random-access-memory
- Hwang, Junghyeon ;
- Shin, Hunbeom ;
- Kim, Chaeheon ;
- Ahn, Jinho ;
- Jeon, Sanghun
- 2024-12
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY
Article
Kinetically Stabilized Hafnia Ferroelectric of Al-Doped HfO2 Film by Fast Ramping and Fast Cooling Process
- Zhang, Lingwei ;
- Kim, Giuk ;
- Lee, Sangho ;
- Shin, Hunbeom ;
- Lim, Youngjin ;
- ... Ahn, Jinho ;
- 외 4명
- 2024-12
- IEEE Transactions on Electron Devices
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC