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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 963건 중 91번부터 100번까지의 결과를 표시합니다.
2024
Article
Kinetically Stabilized Hafnia Ferroelectric of Al-Doped HfO2 Film by Fast Ramping and Fast Cooling Process
- Zhang, Lingwei ;
- Kim, Giuk ;
- Lee, Sangho ;
- Shin, Hunbeom ;
- Lim, Youngjin ;
- ... Ahn, Jinho ;
- 외 4명
- 2024-12
- IEEE Transactions on Electron Devices
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Article
Row hammer-induced D0 failure improvement in sub-20 nm DRAM using an air gap
- Yoon, Jiyeong ;
- Yoon, Seokchan ;
- Ahn, Jinho ;
- Shin, Changhwan
- 2024-12
- Semiconductor Science and Technology
- IOP Publishing Ltd
Article
Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon
- Jung, Taeseung ;
- Kim, Seungyeob ;
- Lee, Sangho ;
- Ahn, Jinho ;
- Jeon, Sanghun
- 2024-12
- Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
- A V S AMER INST PHYSICS
Conference
Dry Development Process for Vertically Tailored Hybrid Multilayer Photoresist Toward High-NA EUV Lithography
- 2024-11-27
Conference
Enhanced Contact Resistance Between ALD-Ru and W by Oxygen Removal Using Forming Gas Annealing
- 2024-11-27
Article
Experimental Analysis on the Interaction Between Interface Trap Charges and Polarization on the Memory Window of Metal-Ferroelectric-Insulator-Si (MFIS) FeFET
- Kim, Giuk ;
- Choi, Hyojun ;
- Lee, Sangho ;
- Shin, Hunbeom ;
- Lee, Sangmok ;
- ... Ahn, Jinho ;
- 외 9명
- 2024-11
- IEEE Transactions on Electron Devices
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Article
Development of a Porous Patterned Membrane with a Large Field Size for EUV Pellicles
- Ha, Tae Joong ;
- Lee, Gi-Sung ;
- Kim, Haneul ;
- Kim, Jungyeon ;
- Ahn, Jinho
- 2024-11
- INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2024
- SPIE-INT SOC OPTICAL ENGINEERING
Conference
Improving Etchability of Challenging Materials through the Ion Implantation Process
- 2024-10-01
Article
Spectral reflectometry characterization of an extreme ultraviolet attenuated phase-shifting mask blank
- Shen, Tao ;
- Mochi, Iacopo ;
- Jeong, Dongmin ;
- Mueller, Elisabeth ;
- Ansuinelli, Paolo ;
- ... Ahn, Jinho ;
- 외 1명
- 2024-10
- Journal of Micro/ Nanolithography, MEMS, and MOEMS
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS