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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 722건 중 201번부터 210번까지의 결과를 표시합니다.
2022
Conference
Experimantal observation of hysteresis in a neon inductively coupled plasma at low pressure
- 2022-04-28
Conference
Experimental Observation of plasma parameter and photoresist ashing in an inductively coupled plasma sources with MRWPT antenna
- 2022-04-28
Article
Measurement of the electron energy distribution functions in low density RF plasmas through a tunable external RF filter
- Jeon, Sang-Bum ;
- Park, Ji-Hwan ;
- Chung, Chin-Wook
- 2022-04
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Conference
Effect of frequency on radial distribution of plasma potential in a dual-frequency capacitively coupled plasma
- 2022-02-17
Article
Low-energy electron beam generation in inductively coupled plasma via a DC biased grid
- Jung, Jiwon ;
- Lee, Moo-Young ;
- Hwang, Jae-Gu ;
- Lee, Moo-Hyun ;
- Kim, Min-Seok ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2022-02
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Plasma and electrical characteristics depending on an antenna position in an inductively coupled plasma with a passive resonant antenna
- Kim, Ju Ho ;
- Chung, Chin-Wook
- 2022-01
- Plasma Sources Science and Technology
- IOP Publishing Ltd