상세 보기
자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 191번부터 200번까지의 결과를 표시합니다.
2022
Conference
A study on the measurement of focus ring thickness in the inductively coupled plasma
- 2022-08-19
Conference
Electron energy probability function measurement in a dual-frequency capacitively coupled argon plasma
- 2022-08-18
Article
Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual-frequency capacitively coupled argon plasma
- Hong, Young-Hun ;
- Kim, Tae-Woo ;
- Kim, Beom-Seok ;
- Lee, Moo-Young ;
- Chung, Chin-Wook
- 2022-07
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Enhanced plasma generation in capacitively coupled plasma using a parallel inductor
- Lim, Yeong-Min ;
- He, You ;
- Lee, Jaewon ;
- Kim, Ju-Ho ;
- Kim, Kyung-Hyun ;
- ... Chung, Chin-Wook
- 2022-06
- Plasma Sources Science and Technology
- IOP Publishing Ltd