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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 722건 중 221번부터 230번까지의 결과를 표시합니다.
2021
Conference
Real-time measurement of dielectric thickness on a millimeter scale using triple-frequency in inductively coupled plasma
- 2021-10-07
Article
Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
- Lee, Moo-Young ;
- Seo, Jong-In ;
- Eo, Hyundong ;
- Kim, Tae-Woo ;
- Jung, Jiwon ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2021-06
- Plasma Sources Science and Technology
- IOP PUBLISHING LTD