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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 722건 중 241번부터 250번까지의 결과를 표시합니다.
2021
Article
Effects of RF bias frequency and power on the plasma parameters and ash rate in a remote plasma source
- Zhang, Aixian ;
- Lee, Moo-Young ;
- Lee, Ho-Won ;
- Moon, Ho-Jun ;
- Chung, Chin-Wook
- 2021-02
- Plasma Sources Science and Technology
- IOP PUBLISHING LTD
Article
Correlation of RF impedance with Ar plasma parameters in semiconductor etch equipment using inductively coupled plasma
- Lee, Nayeon ;
- Kwon, Ohyung ;
- Chung, Chin-Wook
- 2021-02
- AIP Advances
- AMER INST PHYSICS
Article
Local electron and ion density control using passive resonant coils in inductively coupled plasma
- Kim, Tae-Woo ;
- Lee, Moo-Young ;
- Hong, Young-Hun ;
- Lee, Moo-Hyun ;
- Kim, Ju-Ho ;
- ... Chung, Chin-Wook
- 2021-02
- Plasma Sources Science and Technology
- IOP PUBLISHING LTD
2020
Article
The opposite pressure dependence of electron temperature with respect to O-2/Ar mixing ratio in an inductively coupled plasma
- Lee, Moo-Young ;
- Jung, Jiwon ;
- Kim, Tae-Woo ;
- Kim, Kyung-Hyun ;
- Kwon, Deuk-Chul ;
- ... Chung, Chin-Wook
- 2020-11
- Physics of Plasmas
- AMER INST PHYSICS
Conference
Experimental investigation on capacitively coupled plasma source using a passive resonant antenna
- 2020-10-05