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자료 필터
자료유형
발행연도
2011 ~ 2027
2011 2027
키워드
언어
전체 521건 중 71번부터 80번까지의 결과를 표시합니다.
2025
Conference
Improving Hydrogen Resistance of ALD-Processed Oxide Semiconductors through Prioritizing Factors for Memory Device
- 2025-02-14
Article
Reliability Improvement of High Mobility Oxide TFTs Based on Hydrogen-Resistant PEALD Al2O3 Gate Insulators Grown with N2O Plasma
- Kim, Sang-Hyun ;
- Kim, Yoon-Seo ;
- Hwang, Taewon ;
- Kim, Tae Heon ;
- Koo, Haklim ;
- ... Park, Jin-Seong ;
- 외 1명
- 2025-02
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
Article
Advanced atmospheric-pressure spatial atomic layer deposition for OLED encapsulation: Controlling growth dynamics for superior film performance
- Lee, Chi-Hoon ;
- Yoo, Kwang Su ;
- Kim, Daejung ;
- Kim, Ji-Min ;
- Park, Jin-Seong
- 2025-01
- Chemical Engineering Journal
- ELSEVIER SCIENCE SA
Article
Impact of atomic layer deposition supercycle design on the reliability of heterogenous IGZO channel TFTs
- Oh, Hye-Jin ;
- Kim, Hye-Mi ;
- Yoo, Hyeong Suk ;
- Kim, Ji Wan ;
- Baek, Il Jin ;
- ... Park, Jin-Seong
- 2025-01
- Ceramics International
- ELSEVIER SCI LTD
2024
Article
High-Temperature Stable Amorphous Sn-Rich InSnGaO Thin Films Fabricated Via Atomic Layer Deposition for Next-Generation Dynamic Random-Access Memory Applications
- Ryu, Seong-Hwan ;
- Kim, Hye-Mi ;
- Lee, Kwang-Hee ;
- Sung, Ha-Jun ;
- Yang, Jee-Eun ;
- ... Park, Jin-Seong ;
- 외 1명
- 2024-12
- Nano Letters
- AMER CHEMICAL SOC
Article
Compositionally engineered amorphous InZnO thin-film transistor with high mobility and stability via atmospheric pressure spatial atomic layer deposition
- Lee, Chi-Hoon ;
- Yoo, Kwang Su ;
- Kim, Dong-Gyu ;
- Park, Chang-Kyun ;
- Park, Jin-Seong
- 2024-12
- Journal of Industrial and Engineering Chemistry
- ELSEVIER SCIENCE INC
Conference
Exploring the Potential of ALD Oxide Semiconductors in 3D V-NAND Applications via Hybrid Channel Integration
- 2024-10-21
Article
Investigation of silicon nitride for spacer via plasma-enhanced atomic layer deposition using a (tert-butylamino)dimethylsilane precursor
- Park, Chae-Yeon ;
- Yang, Hae Lin ;
- Kim, Hye-Mi ;
- Kim, Daejung ;
- Park, Yongjoo ;
- ... Park, Jin-Seong ;
- 외 2명
- 2024-10
- Applied Surface Science
- ELSEVIER
Article
Synthesis of low-k SiONC thin films by plasma-assisted molecular layer deposition with tetraisocyanatesilane and phloroglucinol
- Park, Gi-Beom ;
- Yang, Hae Lin ;
- Kim, Ji Min ;
- Jung, Hyolim ;
- Baek, Geonho ;
- ... Park, Jin-Seong ;
- 외 1명
- 2024-09
- Nanotechnology
- IOP Publishing Ltd