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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 201번부터 210번까지의 결과를 표시합니다.
2023
Conference
Investigating the Impact of Multi-Emission Layers on the Emissivity of EUV Pellicles
- 2023-06-06
Conference
High-k Based Near n≈1 EUV Mask for M3D Effects and Focus Control in High-NA Lithography
- 2023-06-06
Conference
Near-field Infrared Nanoscopic Study of EUV- and ebeam-exposed Hydrogen Silsesquioxane Photoresist
- 2023-06-06
Article
EUV reflective coherent diffraction imaging system for wafer metrology
- Shen, Tao ;
- Ansuinelli, Paolo ;
- Mochi, Iacopo ;
- Kang, Young Woo ;
- Ahn, Jinho ;
- 외 1명
- 2023-06
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
Conference
Evaluation method for refractive index and extinction coefficient of EUV mask materials
- 2023-03-09
Conference
Atomic layer etching of TiN with partial sequence of O2 plasma and CF3I plasma
- 2023-03-09