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자료 필터
자료유형
발행연도
1995 ~ 2026
1995 2026
키워드
언어
전체 1,062건 중 191번부터 200번까지의 결과를 표시합니다.
2023
Article
Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration
- 이동기 ;
- Moon, Seungchan ;
- Choi, Jinhyuk ;
- 위성주 ;
- Ahn, Jinho
- 2023-08
- Applied Optics
- Optica Publishing Group
Article
Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles
- 위성주 ;
- 김원진 ;
- 김하늘 ;
- 정동민 ;
- 이동기 ;
- ... Ahn, Jinho ;
- 외 3명
- 2023-08
- Membranes
- MDPI
Conference
Impact of MoSi2 Crystal Structure on Emissivity for the Application to EUV Pellicle
- 2023-07-07
Conference
Forming Gas Annealing Effect on Reducing Oxygen at Ru/W Interface for Memory Capacitor Application
- 2023-07-06
Conference
Evaluation Method for Refractive Index and Extinction Coefficient of EUV Mask Materials using Optical Flats
- 2023-07-06