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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 31번부터 40번까지의 결과를 표시합니다.
2025
Conference
Enhanced Electron Density in an Ultra-Low Electron Temperature Plasma via a Parallel Resonant Capacitor in an Inductively Coupled Plasma
- 2025-11-13
Conference
Ultra-Low Electron Temperature Plasma for Atomic-Scale Semiconductor Processing
- 2025-11-13
Conference
Study on SiO₂ Atomic Scale Etching Using Selective Control of Ar Metastable Atom Generation
- 2025-11-12
Article
Dry development of EUV resists via low electron temperature plasma
- Kim, Jiwon ;
- Seok, Ji-Hoo ;
- Jung, Un-Jae ;
- Lee, Taeho ;
- Yoon, Kwang-Sub ;
- ... Chung, Chin Wook ;
- ... Ahn, Jinho
- 2025-11
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
Conference
Experimental Observation of Electron Density Increase below a DC-biased Grid in a Weakly Magnetized Inductively Coupled Plasma
- 2025-10-17
Conference
Ion Energy Distribution Function (IEDF) Simulation Applicable to Customized Bias Voltage Waveform
- 2025-10-16
Conference
The effect of bias frequency on etch profiles in ultra-low electron temperature plasma
- 2025-10-16