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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 21번부터 30번까지의 결과를 표시합니다.
2026
Article
Anomalous electron density of helium, neon, and argon plasmas in high-pressure E-mode inductively coupled plasma
- Kim, Min-Seok ;
- Young, Hun-Hong ;
- Chung, Chin-Wook
- 2026-02
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Precise control of low-energy electron beam for selective radical density control
- Kim, Min-Seok ;
- Lim, Changmin ;
- Nahm, Hyunho ;
- Chung, Chin-Wook
- 2026-02
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Enhanced anisotropy in advanced semiconductor nanofabrication via ultralow electron temperature plasma for cryogenic etching
- Kim, Min-Seok ;
- Ahn, Jong Ha ;
- Kim, Deok Hwan ;
- Ha, Seok Hyeon ;
- Chung, Chin-Wook
- 2026-02
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Simultaneous ion and electron beam etching for charge-free and low-damage silicon processing
- Kim, Gaae ;
- Kim, Min-Seok ;
- Chung, Chin-Wook
- 2026-01
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Realizing Vertical Etch Profiles in Fluorine-Rich Ar/CF4 Plasma
- Park, Junyoung ;
- Kim, Nayeon ;
- Choi, Jung-Eun ;
- Yeo, Yujin ;
- Kim, Min-Seok ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2026-01
- Advanced Materials Interfaces
- WILEY
2025
Article
The impact of accelerated electrons on electronegativity in an inductively coupled oxygen plasma with a DC-biased grid
- Kim, Nayeon ;
- Kim, Min-Seok ;
- Jung, Jiwon ;
- Chung, Chin-Wook
- 2025-12
- Plasma Sources Science and Technology
- IOP Publishing Ltd