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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 612건 중 61번부터 70번까지의 결과를 표시합니다.
2025
Conference
The effect of electron and ion beam on Si etching generated in a low pressure inductively coupled plasma with a DC-biased Grids
- 2025-02-26
Article
Control of the photoresist etch uniformity in inductive discharge with magnetic resonance wireless power transfer
- Park, Junyoung ;
- Hong, Young-Hun ;
- Kang, Gil-Ho ;
- Kim, Min-Seok ;
- Seo, Beom-Jun ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2025-02
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma
- Kim, Min-Seok ;
- Lim, Chang-Min ;
- Kim, Sung Hoon ;
- Kim, Dongmin ;
- Jeon, Hyeongtag ;
- ... Chung, Chin Wook
- 2025-02
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
Article
Effect of controlling residual moisture in atmospheric plasma spray-Y2O3 coatings on random defect generation by halogen-based plasma
- So, Jongho ;
- Choi, Eunmi ;
- Kim, Minjoong ;
- Lee, Dongjin ;
- Seo, Jungpil ;
- ... Chung, Chin-Wook ;
- 외 3명
- 2025-02
- Journal of the European Ceramic Society
- ELSEVIER SCI LTD
2024
Article
Effect of a DC gradient magnetic field on electron density in a weakly magnetized inductively coupled plasma
- He, You ;
- Jiang, Yi-Lang ;
- Lee, Myoung-Jae ;
- Kim, Min-Seok ;
- Seo, Beom-Jun ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2024-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Conference
Comparative Analysis of Methods for RF power absorption by plasma in Inductively Coupled Plasma
- 2024-11-13