상세 보기
자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 41번부터 50번까지의 결과를 표시합니다.
2025
Conference
Controlling the spatial distribution of the electron beam using a grid with spatially varying mesh sizes in inductively coupled plasma
- 2025-10-14
Conference
Reduction of UV-Induced Damage Using a Controllable Electron Temperature Plasma Source
- 2025-10-14
Conference
The effect of cryogenic substrate cooling on electron energy distribution in inductively coupled plasma
- 2025-10-14
Article
Experimental observation of enhanced electron cyclotron resonance heating and nonlocal electron kinetics induced by Ramsauer-Townsend effect in ultralow electron temperature plasmas
- Kim, Min-Seok ;
- Lee, Jeong-Hyun ;
- Choi, Jung-Eun ;
- Chung, Chin-Wook
- 2025-10
- Physical Review E
- AMER PHYSICAL SOC
Conference
Anomalous Behavior of Plasma Potential in a Planar Helical Resonator Discharge
- 2025-09-25
Conference
Tailoring of Pulse Voltage Waveform for Monoenergetic Ion Energy Distributions
- 2025-09-25
Conference
Reduction of Plasma-Induced Damage via Ultra-Low Electron Temperature Plasma in Gate-All-Around FET Fabrication
- 2025-09-25