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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 612건 중 51번부터 60번까지의 결과를 표시합니다.
2025
Conference
Selective Generation of CF₂ Radicals in Ar/CF₄ Plasma with a DC-Biased Grid for High-Precision Atomic Layer Etching
- 2025-06-23
Conference
Improving Power Transfer Efficiency in Inductively Coupled Plasma via Antenna Impedance Tuning
- 2025-06-12
Conference
Investigation of Plasma Potential in Dual-Frequency (2, 27.12 MHz) Inductively Coupled Plasma Using a Circuit Mode
- 2025-06-12
Article
Triple-frequency floating probe method for plasma parameters applicable to processing plasmas
- Seo, Beom-Jun ;
- Lee, Ho-Won ;
- Jeon, Sang-Bum ;
- Nahm, Hyeon-Ho ;
- Chung, Chin-Wook
- 2025-05
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
The impact of electron temperature on etch profiles in Ar/CF4 plasmas
- Kim, Nayeon ;
- Park, Junyoung ;
- Choi, Jung-Eun ;
- Kim, Min-Seok ;
- Lee, MyeongJae ;
- ... Chung, Chin-Wook
- 2025-04
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
Article
Control of axial direction electron temperature distribution by gradient DC magnetic field in inductively coupled plasma
- Jiang, Yi-Lang ;
- He, You ;
- Seo, Beom-Jun ;
- Lee, Myoung-Jae ;
- Kim, Ju-Ho ;
- ... Chung, Chin-Wook
- 2025-03
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Conference
Control of NF3 dissociation in an inductively coupled plasma with a DC bias grid
- 2025-02-26