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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 131번부터 140번까지의 결과를 표시합니다.
2023
Conference
Control of Radical Density through modulation of electron energy probability function in a Dual-Frequency (2 / 27.12 MHz) Inductively Coupled Plasma
- 2023-11-08
Article
Reduced amount of contamination particle generated by CF4/Ar/O2 plasma corrosion of Y2O3 materials: Influence of defluorination process
- Kim, Minjoong ;
- Choi, Eunmi ;
- So, Jongho ;
- Maeng, Seonjeong ;
- Chung, Chin-Wook ;
- 외 2명
- 2023-11
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Series resonance effects of a variable inductor termination on the nonpowered electrode in capacitively coupled plasmas
- Moon, Ho-Jun ;
- Lee, Jae-Won ;
- Lee, Ho-Won ;
- Lim, Yeong-Min ;
- Jung, Jiwon ;
- ... Chung, Chin-Wook
- 2023-09
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS