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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 121번부터 130번까지의 결과를 표시합니다.
2024
Article
A harmonic method for measuring electron temperature and ion density using an asymmetric double probe
- Eo, Hyundong ;
- Park, Sung Joon ;
- Kim, Ju Ho ;
- Chung, Chin-Wook
- 2024-02
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Effect of aluminum content on plasma resistance and contamination particle generation in yttrium aluminum oxide coatings
- So, Jongho ;
- Choi, Eunmi ;
- Kim, Minjoong ;
- Lee, Dongjin ;
- Seo, Jungpil ;
- ... Chung, Chin-Wook ;
- 외 3명
- 2024-02
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
2023
Article
Ion energy distribution measurement device using a capillary plate with high-aspect ratio
- Lee, Ho-Won ;
- Kim, Ju-Ho ;
- Chung, Chin-Wook
- 2023-12
- Physics of Plasmas
- AIP Publishing
Conference
Floating harmonic probe measurement using Indium Tin Oxide (ITO) glass for noninvasive plasma diagnostics
- 2023-11-20
Conference
Ultra-Low Electron Temperature (ULET) Plasma for Damage-Free Plasma Processing
- 2023-11-20
Conference
The effect of RF bias frequency on the ion energy distribution in an ultra-low electron temperature plasma
- 2023-11-08