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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 151번부터 160번까지의 결과를 표시합니다.
2023
Conference
Floating harmonic probe measurement through thick dielectric material for noninvasive plasma diagnostics
- 2023-08-10
Article
Investigation of contamination particles generation and surface chemical reactions on Al2O3, Y2O3, and YF3 coatings in F-based plasma
- So, Jongho ;
- Kim, Minjoong ;
- Kwon, Hyuksung ;
- Maeng, Seonjeong ;
- Choi, Eunmi ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2023-08
- Applied Surface Science
- ELSEVIER
Article
Improvement of photoresist etching by impedance control of a bias electrode in an inductive discharge
- He, You ;
- Jiang, Yi-Lang ;
- Jung, Jiwon ;
- Kim, Min-Seok ;
- Kim, Ju-Ho ;
- ... Chung, Chin-Wook
- 2023-07
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
High-speed plasma diagnostics based on the floating harmonic method in inductively coupled plasma and pulsed plasma
- Seo, Beom-Jun ;
- Kim, Kyung-Hyun ;
- Eo, Hyundong ;
- Lee, Ho-Won ;
- Kim, Ju Ho ;
- ... Chung, Chin-Wook
- 2023-07
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma
- 하우 ;
- Lim, Yeong-Min ;
- Lee, Jun-Ho ;
- Kim, Ju-Ho ;
- Lee, Moo-Young ;
- ... Chung, Chin-Wook
- 2023-04
- Plasma Science and Technology
- IOP Publishing Ltd