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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 181번부터 190번까지의 결과를 표시합니다.
2022
Conference
Electron-assisted PR etching in an inductivley coupled oxygen plasma via low-energy electron beam
- 2022-11-14
Conference
Modeling of electron temperature and electron density in ultra-low electron temperature
- 2022-11-14
Conference
Development of high ion density and uniformity plasma source for large scale descum processing
- 2022-11-10
Article
Two-dimensional measurements of the ELM filament using a multi-channel electrical probe array with high time resolution at the far SOL region in the KSTAR
- Hong, Young-Hun ;
- Kim, Kwan-Yong ;
- Kim, Ju-Ho ;
- Son, Soo-Hyun ;
- Lee, Hyung-Ho ;
- ... Chung, Chin-Wook ;
- 외 3명
- 2022-10
- Nuclear Engineering and Technology
- KOREAN NUCLEAR SOC
Article
Effect of electron energy distributions on the electron density in nitrogen inductively coupled plasmas
- Kim, Kwan-Yong ;
- Kim, Jung Hyung ;
- Chung, Chin-Wook ;
- Lee, Hyo-Chang
- 2022-10
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Correlation of SiO2 etch rate in CF4 plasma with electrical circuit parameter obtained from VI probe in inductively coupled plasma etcher
- Lee, Nayeon ;
- Lee, Woohyun ;
- Kwon, Ohyung ;
- Chung, Chin-Wook
- 2022-09
- Journal of Physics D: Applied Physics
- IOP Publishing Ltd
Article
Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge
- Hong, Young-Hun ;
- Kim, Tae-Woo ;
- Kim, Ju-Ho ;
- Lim, Yeong-Min ;
- Lee, Moo-Young ;
- ... Chung, Chin Wook
- 2022-09
- Physics of Plasmas
- AIP Publishing
Article
Atmospheric Plasma Spray코팅을 이용한 Yttrium계 소재의 내플라즈마성 및 세정 공정에 관한 연구
- 권혁성 ;
- 김민중 ;
- 소종호 ;
- 신재수 ;
- 정진욱 ;
- 외 2명
- 2022-09
- 반도체디스플레이기술학회지
- 한국반도체디스플레이기술학회