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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 171번부터 180번까지의 결과를 표시합니다.
2023
Article
Electron-assisted PR etching in oxygen inductively coupled plasma via a low-energy electron beam
- Jung, Jiwon ;
- 김민석 ;
- Park, Junyoung ;
- 임창민 ;
- 황태웅 ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2023-02
- Physics of Plasmas
- AIP Publishing
Article
A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current
- Eo, Hyundong ;
- Kim, Kyung-Hyun ;
- Lee, Moo-Young ;
- Kim, Ju Ho ;
- Chung, Chin-Wook
- 2023-02
- Physics of Plasmas
- AIP Publishing
Article
Highly efficient plasma generation in inductively coupled plasmas using a parallel capacitor
- Lim, Yeong-Min ;
- Hong, Young-Hun ;
- 강길호 ;
- Chung, Chin-Wook
- 2023-01
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2022
Article
Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma
- Lim, Yeong-Min ;
- Park, So-Yeong ;
- 하우 ;
- Hong, Young-Hun ;
- Chung, Chin Wook
- 2022-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Conference
Enhancement of photoresist etching by controlling the impedance between bias electrode and ground in an inductively coupled plasma
- 2022-11-16
Conference
Improvement of spatial distribution measurement of plasma parameters through asymmetric double Langmuir probe
- 2022-11-16