정진욱

전체 720건 중 81번부터 90번까지의 결과를 표시합니다.

2024

Conference

Low-damage etching of poly-Si and SiO2 via a low-energy electron beam in inductively coupled CF4 plasma

정진욱

2024-11-13

Conference

On high efficiency plasma generation using antenna impedance tuning in an inductively coupled plasma

정진욱

2024-11-13

Conference

Optical Emission Spectroscopy analysis integrated with electrical method for measuring accurate plasma radical density

정진욱

2024-11-13

Conference

Charge-Free Plasma Processing Using Ultra-Low Electron Temperature Plasma for Atomic Scale Semiconductor Devices

정진욱

2024-11-13

Conference

Ideal Si etching with ultra-low electron temperature CF4 plasma

정진욱

2024-11-13

Conference

Plasma Diagnostic with a Transparent(ITO) Probe Based on the Floating Harmonic Method

정진욱

2024-11-07

Conference

On the compensation method of the attenuation of the light intensities in fluorocarbon plasmas

정진욱

2024-11-07

Conference

Si etch characteristics in an ultra-low electron temperature CF4 plasma

정진욱

2024-11-07

Conference

Experimental observation on electronegativity variation in inductively coupled oxygen plasma with DC biased grid

정진욱

2024-10-02

Conference

On the new interpretation method of floating harmonic probe (FHP) in the presence of an electron beam

정진욱

2024-10-01

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언어

Low-damage etching of poly-Si and SiO2 via a low-energy electron beam in inductively coupled CF4 plasma

On high efficiency plasma generation using antenna impedance tuning in an inductively coupled plasma

Optical Emission Spectroscopy analysis integrated with electrical method for measuring accurate plasma radical density

Charge-Free Plasma Processing Using Ultra-Low Electron Temperature Plasma for Atomic Scale Semiconductor Devices

Ideal Si etching with ultra-low electron temperature CF4 plasma

Plasma Diagnostic with a Transparent(ITO) Probe Based on the Floating Harmonic Method

On the compensation method of the attenuation of the light intensities in fluorocarbon plasmas

Si etch characteristics in an ultra-low electron temperature CF4 plasma

Experimental observation on electronegativity variation in inductively coupled oxygen plasma with DC biased grid

On the new interpretation method of floating harmonic probe (FHP) in the presence of an electron beam