상세 보기
자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 612건 중 71번부터 80번까지의 결과를 표시합니다.
2024
Conference
Optical Emission Spectroscopy analysis integrated with electrical method for measuring accurate plasma radical density
- 2024-11-13
Conference
Charge-Free Plasma Processing Using Ultra-Low Electron Temperature Plasma for Atomic Scale Semiconductor Devices
- 2024-11-13
Conference
On the compensation method of the attenuation of the light intensities in fluorocarbon plasmas
- 2024-11-07
Conference
Plasma Diagnostic with a Transparent(ITO) Probe Based on the Floating Harmonic Method
- 2024-11-07
Conference
Experimental observation on electronegativity variation in inductively coupled oxygen plasma with DC biased grid
- 2024-10-02
Conference
On the new interpretation method of floating harmonic probe (FHP) in the presence of an electron beam
- 2024-10-01
Conference
Electron Cyclotron Resonance in a Weakly Magnetized Inductively Coupled Plasma with a DC-biased Grid
- 2024-10-01
Conference
The uniformity of low-energy electron beam in an oxygen inductively coupled plasma
- 2024-10-01