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자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 91번부터 100번까지의 결과를 표시합니다.
2024
Conference
Electron Cyclotron Resonance in a Weakly Magnetized Inductively Coupled Plasma with a DC-biased Grid
- 2024-10-01
Conference
Effects of DC magnetic field on an inductively coupled plasma with a DC biased grid
- 2024-10-01
Conference
Bias waveform adjustment to substrate for mono-energetic ion energy distribution
- 2024-10-01
Conference
The uniformity of low-energy electron beam in an oxygen inductively coupled plasma
- 2024-10-01
Conference
Electron Beam Energy Distribution in a Pulsed-inductively discharge with a DC-biased grid
- 2024-10-01
Conference
Effect of Plasma Heat flux on Cryogenic Substrate Temperature in an Inductive Discharge with RF bias power
- 2024-10-01
Conference
On the validity of power transfer efficiency measurement in an inductively coupled plasma
- 2024-10-01
Article
Low-damage etching of poly-Si and SiO<sub>2</sub> via a low-energy electron beam in inductively coupled CF<sub>4</sub> plasma
- Jung, Jiwon ;
- Kim, Jae-Hwi ;
- Lim, Chang-Min ;
- Choi, Jung-Eun ;
- Bae, Junil ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2024-10
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Damage-Free Plasma Source for Atomic-Scale Processing
- Park, Junyoung ;
- Jung, Jiwon ;
- Kim, Min-Seok ;
- Lim, Chang-Min ;
- Choi, Jung-Eun ;
- ... Chung, Chin-Wook ;
- 외 2명
- 2024-09
- Nano Letters
- AMER CHEMICAL SOC