상세 보기
자료 필터
자료유형
발행연도
2002 ~ 2026
2002 2026
키워드
언어
전체 720건 중 11번부터 20번까지의 결과를 표시합니다.
2026
Conference
Antenna impedance tuning for enhanced power transfer and plasma density using a Faraday shield in inductively coupled plasma
- 2026-03-03
Article
Transparent electrical-optical probe for noninvasive plasma diagnostics
- Seo, Beom-Jun ;
- Kim, Kyung-Hyun ;
- Ahn, Se-hun ;
- Kim, Deok-Hwan ;
- Jung, Un Jae ;
- ... Chung, Chin-Wook
- 2026-03
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Article
Low-energy electron beam control via magnetic confinement and acceleration voltage: implications for photoresist etching
- Kim, Ju-Ho ;
- Jiang, Yi-Lang ;
- Jeong, Yeong Jae ;
- Kim, Jae-Hwi ;
- Chung, Chin-Wook
- 2026-03
- Plasma Sources Science and Technology
- IOP Publishing Ltd
Conference
Damage-free plasma processing of EUV metal-oxide resists using a novel plasma source
- 2026-02-25