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자료 필터
자료유형
발행연도
2011 ~ 2027
2011 2027
키워드
언어
전체 521건 중 51번부터 60번까지의 결과를 표시합니다.
2025
Conference
Design of Crystalline InGaO Channels with High-Temperature Stability via Thermal ALD Process Parameter Variations
- 2025-06-24
Conference
Highly Ordered Crystalline ALD-InGaO Thin Films with High Mobility and Thermal Stability for Next-Generation 3D Memory Devices
- 2025-06-24
Conference
Tuning of Effective work function in Cl free TiAlN ALD through fine Al doping process for Gate electrode application
- 2025-06-24
Conference
Thermal Annealing of Molecular Layer-Deposited Tincone : Unveiling Sulfur's Structural Impacts in Graphitic Carbon Formation
- 2025-06-24
Conference
Enhancement of Stress Distribution through Patterned Island Design Using Atmospheric Pressure Spatial-ALD
- 2025-06-24
Conference
Influence of Hydrocarbon Chain Length in Phenyl(Alkyl)trimethoxysilane Inhibitors on AS-ALD Selectivity: Comparison of Gas-phase and Liquid-phase Adsorption
- 2025-06-23
Conference
Exploring Atomic Layer Etching Behavior Differences in ZnO Crystallographic Planes and Surface Energy Analysis via DFT
- 2025-06-23
Conference
Enhancing TCO Performance via Precursor-Controlled Crystallization in Low-Resistivity PEALD In₂O₃ Films
- 2025-06-04
Conference
Contact Resistivity Reduction in IGZO/Metal Interfaces via Ultra-Thin SiO2 Layers: Comparative Analysis Using TLM and CBKR
- 2025-06-04
Article
Challenges of Atomic-Layer-Deposited Oxide Semiconductor Channels beyond PVD: Material, Devices, and M3D Stacked Structures
- Kim, Yoon-Seo ;
- Choi, Su-Hwan ;
- Oh, Hyejin ;
- Hwang, Taewon ;
- Park, Jin-Seong
- 2025-06
- Digest of Technical Papers - SID International Symposium